Wuxi Solution Technology Co., Ltd. is a High-tech corporation who covers the areas of semiconductor, FPD, LED, agent parts and chemical. Our main customers include SKhynix?CSMC?Intel etc. The parts consists of Wet Cleaning Second Source Parts?CMP Parts etc. Please refer to our website for more information. Welcome to contact us for business or other ways of Cooperation.
Sales Phone: +86-510-81880058E-mail: [email protected]
Telephone: +86-13306189603website: www.solutx.com
? Semiconductor Used Tool List_Solution Technology_Rev02_201302
Wafer Size Classification Tool Information
Maker Model
12" CMP CMP AMAT Reflexion
12" CMP CMP AMAT Reflexion LK CMP
8" CMP CMP AMAT Mirra CMP
8" CMP CMP System Polisher NOVELLUS 676
12" DIFF EPI AMAT Centura Epi
8" DIFF EPI AMAT Centura Epi
12" DIFF RTP AMAT Vantage Radiance/Centura RTP
8" DIFF RTP AMAT Centura RTP
12" DIFF SiNgen AMAT Centura SiNgen
8" DIFF SiNgen AMAT Centura SiNgen
8" DIFF Ion Implanter(high current) AMAT PI-9500
8" DIFF Furnace KE DJ-853V-8DL
6"/8" DIFF Furnace KE VERTRON ?
8" DIFF HTO KE DJ-823V-8BL
8" DIFF PYRO(TLC) KE DD-853V-8BL
8" DIFF Undopped-Poly KE DJ-802V
8" DIFF TEOS KE DJ-802V
8" DIFF PYRO KE DD-802V
8" DIFF NITRIDE KE DJ-802V
8" DIFF Dopped-Poly KE DJ-853V-8BL
8" DIFF L/L NITRIDE KE DJ-835V-8BL
8" DIFF NITRIDE TEL ALPHA 805 SCN
8" DIFF NITRIDE TEL ALPHA 808 SC
8" DIFF TEOS TEL ALPHA 808 SC
8" DIFF L/L NITRIDE TEL ALPHA 8S-ZVN
8" DIFF Dopped-Poly TEL ALPHA 808 SCN
8" DIFF NITRIDE KE DJ-853V-8BL
8" DIFF SOG CURING KE DJ-853V-8BL
8" DIFF TEOS KE DJ-853V-8BL
8" DIFF RTP AG Heat Pulse 8108
