Active axes: X, Y, Z, θX, θY, θZ
X,Y Nominal travel range(0~120V):±25μm
Z Nominal travel range(0~120V): ±12.8μm
θX, θY Nominal travel range(0~120V): ±0.64mrad
θZ Nominal travel range(0~120V):±0.96mrad
construction features :
Insulation is on the broadside, the piezoelectric ceramic cross-sectional area can actuator, and it is high output , performance in good condition to show that there is no local electric field deformation.